In-Situ Fluorescence Strain Sensing of the Stress in Interconnects
- 1 January 1994
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Mechanical properties of thin filmsMetallurgical Transactions A, 1989
- Spectroscopic technique for the measurement of residual stress in sintered Al2O3Journal of Applied Physics, 1978