Energetic particles in the sputtering of an indium–tin oxide target

• 1 July 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 12  (4) , 1435-1438
• https://doi.org/10.1116/1.579333

Abstract

Keywords

• INDIUM
• ENERGETIC PARTICLES
• TIN OXIDE
• SPUTTERING
• OXIDE TARGET