Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high T c bulk material
- 24 August 1987
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 51 (8) , 619-621
- https://doi.org/10.1063/1.98366
Abstract
We report the first successful preparation of thin films of Y‐Ba‐Cu‐O superconductors using pulsed excimer laser evaporation of a single bulk material target in vacuum. Rutherford backscattering spectrometry showed the composition of these films to be close to that of the bulk material. Growth rates were typically 0.1 nm per laser shot. After an annealing treatment in oxygen the films exhibited superconductivity with an onset at 95 K and zero resistance at 85 and 75 K on SrTiO3 and Al2O3 substrates, respectively. This new deposition method is relatively simple, very versatile, and does not require the use of ultrahigh vacuum techniques.Keywords
This publication has 8 references indexed in Scilit:
- Thin superconducting oxide filmsPhysical Review B, 1987
- Hall Effect in Superconducting (La1-xSrx)2CuO4 Single Crystal Thin FilmsJapanese Journal of Applied Physics, 1987
- Deposition of SrxLa2-xCuO4-y Thin Films by SputteringJapanese Journal of Applied Physics, 1987
- Compositional and Structural Analyses for Optimizing the Preparation Conditions of Superconducting (La1-xSrx)yCuO4-δ Films by SputteringJapanese Journal of Applied Physics, 1987
- Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressurePhysical Review Letters, 1987
- Possible highT c superconductivity in the Ba?La?Cu?O systemZeitschrift für Physik B Condensed Matter, 1986
- Algorithms for the rapid simulation of Rutherford backscattering spectraNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Recent progress on LADA growth of HgCdTe and CdTe epitaxial layersJournal of Vacuum Science & Technology A, 1983