Laser plasma diamond
- 1 November 1990
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 5 (11) , 2398-2404
- https://doi.org/10.1557/jmr.1990.2398
Abstract
Diamond-like films containing no hydrogen can be deposited from laser plasmas that are highly ionized. Growth rates of 0.5 μm/h over 100 cm2 areas have been realized on untreated substrates of a variety of materials including Si, Ge, ZnS, glass, and plastics. Measurements of optical properties and mass densities support the identification of this laser plasma diamond as a conglomerate of very fine grains of diamond polytypes in a matrix of other carbon forms.Keywords
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