Resonance-Enhanced Multiphoton Ionization Study of NO Scattering from a Corrugated Si(100) Surface with Oxygen Coverage
- 1 February 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (2R)
- https://doi.org/10.1143/jjap.30.349
Abstract
The resonance-enhanced multiphoton ionization (REMPI) technique has been used to probe the dynamics of NO scattering from oxygen-covered Si(100) as a function of incident beam energy E i and incident angle θi. A direct inelastic scattering process as well as a trapping-desorption process was observed to occur even for the lowest incident energy available in our apparatus, 0.09 eV. Considerable loss in the peak velocity was found to be E i-dependent for the direct inelastic component scattered at the specular angle. The angular width of the scattering lobe increased with increasing E i. These facts are qualitatively explained in terms of the surface corrugation.Keywords
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