Intra-field gate CD variability and its impact on circuit performance
- 22 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Within-chip variability analysisPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Analysis and decomposition of spatial variation in integrated circuit processes and devicesIEEE Transactions on Semiconductor Manufacturing, 1997
- Use of short-loop electrical measurements for yield improvementIEEE Transactions on Semiconductor Manufacturing, 1995