Electric breakdown in GaN p-n junctions

Abstract
Electric breakdown in GaN p-n junctions was investigated. GaN p+-p-n+ structures were grown on 6H–SiC substrates by metalorganic chemical vapor deposition. Mg and Si were used as dopants. Mesa structures were fabricated by reactive ion etching. Capacitance–voltage measurements showed that the p-n junctions were linearly graded. The impurity gradient in the p-n junctions ranged from 2×1022 to 2×1023 cm−4. Reverse current–voltage characteristics of the p-n junctions were studied in the temperature range from 200 to 600 K. The diodes exhibited abrupt breakdown at a reverse voltage of 40–150 V. The breakdown had a microplasmic nature. The strength of the electric breakdown field in the p-n junctions depended on the impurity gradient and was measured to be from 1.5 to 3 MV/cm. It was found that the breakdown voltage increases with temperature. The temperature coefficient of the breakdown voltage was ∼2×10−2 V/K.