Polysiloxanes for deep UV lithography
- 1 December 1985
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 3 (1-4) , 293-304
- https://doi.org/10.1016/0167-9317(85)90039-5
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- The Preparation and Properties of a Polysiloxane Electron ResistJournal of the Electrochemical Society, 1973
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