Successive Growth of Si and SiO[sub 2] in Epitaxial Apparatus

• 1 January 1964
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 111  (2) , 206
• https://doi.org/10.1149/1.2426084

Abstract

Keywords

• SUCCESSIVE GROWTH
• EPITAXIAL APPARATUS
• SUB
• GROWTH OF SI
• SI AND SIO