Effects of Chamber Wall Heating and Quartz Window on Fast Deposition of Microcrystalline Silicon Films by High-Density Microwave Plasma
- 9 December 2004
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 43 (12) , 7960-7965
- https://doi.org/10.1143/jjap.43.7960
Abstract
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