Effects of oxygen pressure in reactive ion beam sputter deposition of zirconium oxides
- 1 July 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 6 (4) , 2326-2332
- https://doi.org/10.1116/1.575584
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: