Niobium microbridges for SQUID applications
- 1 March 1975
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Magnetics
- Vol. 11 (2) , 782-784
- https://doi.org/10.1109/tmag.1975.1058736
Abstract
Niobium microbridges developed for SQUID applications are discussed. We can reliably produce superconducting films down to a thickness of 50 Angstroms using rf bias sputtering techniques. Bridge patterns of submicron width are produced through electron lithography with a scanning electron microscope/flying spot scanner combination. The transition from macroscopic leads to the microbridge is made with a multiple exposure technique. The pattern is reproduced in the superconducting niobium films by sputter etching.Keywords
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