Fabrication of microcomponents using ultraprecision machine tools

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Abstract
The fabrication of microcomponents or microstructured surfaces with conventional manufacturing methods - such as turning, milling or drilling - imposes high demands on the machine behavior. The high requirements in terms of machine characteristics are currently met by only few ultraprecision machine tools. A broad range of materials such as, for example, non-ferrous metals or plastics can be machined, producing real three-dimensional structures with an optical surface quality