Sequential turret source-masking system for fabrication of multilayer structures
- 1 September 2000
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 18 (5) , 2595-2596
- https://doi.org/10.1116/1.1285989
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A sequential masking system for the deposition of multilayer thin-film structuresJournal of Vacuum Science & Technology A, 1987