A systems approach to 1-µm NMOS

1 May 1983

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in Proceedings of the IEEE

Vol. 71 (5) , 640-656
https://doi.org/10.1109/proc.1983.12646

Abstract

In 1977, groups from diverse disciplines at Bell Labs were brought together for the first time, with the goal of applying a systems approach to high-performance NMOS technology. These groups, namely, solid-state physics, device design, materials, processing, and lithography found a symbiotic relationship that has produced not only NMOS devices with unparalleled performance, but also improved materials, processes, and tools-many of which are in production today.

Keywords

MOS DEVICES
SOLID MODELING
LITHOGRAPHY
FABRICATION
TESTING
CONDUCTING MATERIALS
SCANNING ELECTRON MICROSCOPY
LABORATORIES
SOLID STATE CIRCUITS
TRANSMISSION ELECTRON MICROSCOPY

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