Production of focused, low-energy, hydrogen-ion beams using a Colutron ion source
- 1 January 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 6 (1) , 485-490
- https://doi.org/10.1116/1.584047
Abstract
An ion beam decelerator for energies down to 5 eV is described. The decelerator is a Menzinger retardation system that has been modified according to the results of calculations using a ray tracing model to optimize lens geometry. Performance tests of the decelerator demonstrate that H+ 2beams with currents ≥20 nA can be obtained with a spot size adjustable from 0.5 to 10 mm using a beam raster system.Keywords
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