High-performance, focusing-type, time-of-flight atom probe with a channeltron as a signal detector

1 January 1984

journal article
Published by AIP Publishing in Applied Physics Letters

Vol. 44 (1) , 38-40
https://doi.org/10.1063/1.94542

Abstract

We have constructed a focusing-type, time-of-flight atom probe which enables us to focus the ion beam to a spot of ∼1 mm diameter. Under this condition, a channeltron can be used as a signal detector replacing the conventional channel plate. Practically 100% detection efficiency was achieved for the first time in the atom-probe history.

Keywords

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