Fabrication of submicron apertures in thin membranes of silicon nitride
- 1 March 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 11 (2) , 259-262
- https://doi.org/10.1116/1.586667
Abstract
A technique for manufacturing submicron apertures used for investigating hydrodynamic quantum phenomena in the superfluids 4He and 3He is described. The apertures are fabricated in ∼100 nm thick suspended membranes of silicon nitride by using e‐beam lithography and reactive ion etching.Keywords
This publication has 0 references indexed in Scilit: