Automatic correction for effects of Auger line‐shape changes on depth profiles

• 1 January 1977
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 14  (1) , 232-235
• https://doi.org/10.1116/1.569129

Abstract

Keywords

• SHAPE CHANGES
• AUTOMATIC CORRECTION
• AUGER LINE
• DEPTH PROFILES
• EFFECTS OF AUGER
• CORRECTION FOR EFFECTS