Raman spectroscopy of GaN, AlGaN and AlN for process and growth monitoring/control

• 4 October 2001
• journal article
• research article
• Published by Wiley in Surface and Interface Analysis
• Vol. 31  (10) , 987-999
• https://doi.org/10.1002/sia.1134.abs

Abstract

Keywords

• RAMAN SPECTROSCOPY
• GAN
• ALGAN
• ALN
• PROCESS
• GROWTH
• MONITORING
• CONTROL