Hexafluoroacetone, monochloropentafluoroacetone, and dichlorotetrafluoroacetone cause fission of the silicon–nitrogen bond in certain aminosilanes, to form the corresponding insertion products. Hexafluoroacetone is found to insert similarly into the germanium–nitrogen and the tin–nitrogen bond. Insertion into the silicon–nitrogen bonds of a diazasilacyclopentane also causes polymerization.