Monolithic Silicon Microphotonics

• 2 February 2004
• book chapter
• Published by Springer Nature
• p. 89-120
• https://doi.org/10.1007/978-3-540-39913-1_3

Abstract

Keywords

• 42.70.-A
• 84.40.UA
• 85.60.-Q
• 42.82.-M
• 85.85.+J