An electron image projector with automatic alignment
- 1 July 1975
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 22 (7) , 409-413
- https://doi.org/10.1109/t-ed.1975.18152
Abstract
An electron image projector for silicon device processing is described which uses an air-cored solenoid and a caesium iodide photocathode. The alignment method is based on the X-rays which are generated when high-voltage electrons strike matter. Phase sensitive detection is used to convert the off balance to a linear signal which is then fed back into analog electronics. Results are presented showing a marker pattern automatically aligned to an accuracy of 0.1 µm.Keywords
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