Fiber-optic displacement sensor with 0.02 μm resolution by white-light interferometry
- 31 October 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 25 (1-3) , 201-207
- https://doi.org/10.1016/0924-4247(90)87032-e
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- High-Accuracy Position-Sensing With Fiber-Coupled White-Light InterferometersPublished by SPIE-Intl Soc Optical Eng ,1984
- Nouvelle Méthode de Mesure de la Visibilité de la Modulation Spectrale pour de Grandes Différences de MarcheCanadian Journal of Physics, 1972