Coulomb interactions in a shaped ion beam pattern generator

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 2809-2813
• https://doi.org/10.1116/1.586007

Abstract

Keywords

• COULOMB INTERACTIONS
• BEAM PATTERN GENERATOR
• SHAPED ION BEAM