Towards a physical understanding of spreading resistance probe technique profiling

• 1 January 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (1) , 304-311
• https://doi.org/10.1116/1.587158

Abstract

Keywords

• TECHNIQUE PROFILING
• RESISTANCE PROBE
• SPREADING RESISTANCE
• PROBE TECHNIQUE
• PHYSICAL UNDERSTANDING