GaInAs/Inp pin photodetectors integrated with glass waveguides

Abstract
GaInAs/InP pin photodetectors K +-exchanged channel glass waveguides have been integrated using substrate etch-off, a variation of epitaxial lift-off. Coupling of 1.3 μm wavelength light from the single mode glass waveguide to the photo-detectors is characterised and is found to be in good agreement with calculated values.