X‐ray Photoelectron Spectroscopy Characterization of Ion‐Beam Sputter‐Deposited Calcium Phosphate Coatings

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Abstract
X‐ray photoelectron spectroscopy (XPS) analysis of sputter‐deposited calcium phosphate coatings on titanium substrates revealed four distinct zones. The ambient‐exposed surface exhibited elevated concentrations of carbon because of atmospheric contamination. The bulk zone contained relatively constant concentrations of calcium, oxygen, phosphorus, and fluorine indicating the chemistry for calcium fluoride (CaF2) and fluorapatite (Ca5 (PO4),F) formation. The transitional zone exhibited elevated titanium and oxygen photoelectron peaks suggesting the coexistence of calcium phosphate compounds within the titanium oxide. The substrate was shown to be identical to the passivated titanium surface prior to deposition.