aSi:H produced by double ion-beam sputtering
- 1 December 1983
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 59-60, 723-726
- https://doi.org/10.1016/0022-3093(83)90273-9
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Summary Abstract: Ion beam deposition of hydrogenated amorphous silicon filmsJournal of Vacuum Science and Technology, 1982
- Transport properties of a-Si: H alloys prepared by r.f. sputtering IPhilosophical Magazine Part B, 1981
- Infrared Spectrum and Structure of Hydrogenated Amorphous SiliconPhysica Status Solidi (b), 1980
- Dissent from the dihydride model of the vibrational spectra of amorphous silicon-hydrogen alloysSolid State Communications, 1980