Deposition and properties of polycrystalline TiN/NbN superlattice coatings

• 1 July 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 10  (4) , 1604-1609
• https://doi.org/10.1116/1.578030

Abstract

Keywords

• TRANSMISSION ELECTRON MICROSCOPY
• SUPERLATTICES
• SINGLE CRYSTAL
• MAGNETRON SPUTTERING
• TITANIUM
• ION BEAM
• CRYSTAL STRUCTURE
• ENERGY DISPERSIVE SPECTROSCOPY
• NITROGEN
• MICROSTRUCTURES
• X RAY DIFFRACTION
• IRON