Influence of residual stresses on the mechanical properties of TiCxN1–x (x=0, 0.15, 0.45) thin films deposited by arc evaporation
- 1 August 2000
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 371 (1-2) , 167-177
- https://doi.org/10.1016/s0040-6090(00)00996-2
Abstract
No abstract availableKeywords
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