Micromachined Resonant Sensors— an Overview

• 1 August 1998
• journal article
• research article
• Published by Wiley in Sensors Update
• Vol. 4  (1) , 3-51
• https://doi.org/10.1002/1616-8984(199808)4:1<3::aid-seup3>3.0.co;2-t

Abstract