New Application of Se–Ge Glasses to Silicon Microfabrication Technology

• 1 January 1977
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 16  (S1) , 67
• https://doi.org/10.7567/jjaps.16s1.67

Abstract

Keywords

• NEW APPLICATION
• SILICON MICROFABRICATION
• GE GLASSES
• MICROFABRICATION TECHNOLOGY