Detection of Single Atom Extraction and Deposition Events during Nanolithographic Processing of Silicon with a Scanning Tunneling Microscope.
- 1 January 1993
- journal article
- Published by Japan Academy in Proceedings of the Japan Academy, Series B
- Vol. 69 (5) , 101-106
- https://doi.org/10.2183/pjab.69.101
Abstract
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