Surface micrometrology using ultrasound
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 1047-1052
- https://doi.org/10.1109/ultsym.1990.171522
Abstract
The development of ultrasonic scattering and reflection techniques for the online measurement of machined part surface features is described. A range of ultrasonic frequencies and beam dimensions was supplied to shaped and turned sample surfaces, using both scattering and profiling techniques. It is demonstrated that it is feasible for pulsed ultrasound to resolve average roughness values and discrete asperities of less than 1 mu m.Keywords
This publication has 3 references indexed in Scilit:
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- Ultrasonic anomalies in the spectrum of acoustic waves diffracted by periodic interfacesJournal of Applied Physics, 1982