Aluminum oxide thin films prepared by chemical vapor deposition from aluminum 2-ethylhexanoate
- 13 May 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (19) , 2079-2080
- https://doi.org/10.1063/1.105016
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Preparation and optical characterization of pyrolytically deposited thin films of some metal oxidesThin Solid Films, 1986
- Deposition and Properties of Aluminum Oxide Obtained by Pyrolytic Decomposition of an Aluminum AlkoxideJournal of the Electrochemical Society, 1967