Capabilities and limitations of interference microscopy for two- and three-dimensional surface-measuring technology
- 1 October 1996
- journal article
- Published by Elsevier in Measurement
- Vol. 19 (2) , 95-102
- https://doi.org/10.1016/s0263-2241(96)00069-3
Abstract
No abstract availableKeywords
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- Meßgerät für Rauheitsmessungen im Nanometerbereich an feinstbearbeiteten OberflächenTM - Technisches Messen, 1994
- Surface Profiles Obtained by Means of Optical Methods — Are They True Representations of the Real Surface?CIRP Annals, 1990