Measuring Small Gas Flows Into Vacuum Systems
- 1 January 1969
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 6 (1) , 255-257
- https://doi.org/10.1116/1.1492673
Abstract
A description of a new mass flowmeter for measuring small flow rates into vacuum systems on a continuous, direct reading, and instantaneous basis. The theory, operation, and characteristics are described including typical performance results in practical applications.Keywords
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