Topographical limitations to the metallization of very large scale integrated structures by bias sputtering: Experiments and computer simulations
- 1 September 1986
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 4 (5) , 1192-1194
- https://doi.org/10.1116/1.583482
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: