Polymeric Electron Beam Resists
Open Access
- 1 January 1969
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 116 (7) , 980-985
- https://doi.org/10.1149/1.2412194
Abstract
Crosslinking polymers may be used as negative acting resists. The product of the minimum charge dose required and the weight average molecular weight is a constant and is a characteristic of the polymer. At an electron beam voltage of 10 kV, this Q‐M product is found experimentally to be 6.3 coul‐g/cm2‐mole for polystyrene, 1 coul‐g/cm2‐mole for poly (vinyl chloride), and 14 coul‐g/cm2‐mole for polyacrylamide. Degrading polymers may be used as positive acting resists. Their average molecular weights have only a very minor effect on their efficiency as positive resists. Their glass transition temperatures are an important factor. It is recommended that these resists be prebaked at , stored and developed at , and postbaked at .Keywords
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