A Fast and Precise Specimen Preparation Technique for TEM Investigation of Prespecified Areas of Semiconductor Devices
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A fast preparation technique for high-quality plan view and cross-section TEM specimens of semiconducting materialsUltramicroscopy, 1989
- A variation of transmission electron microscope sample preparation for VLSI analysisJournal of Electron Microscopy Technique, 1989