Investigation of the nucleation mechanism in bias-enhanced diamond deposition

• 1 January 1996
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 68  (1) , 22-24
• https://doi.org/10.1063/1.116743

Abstract

Keywords

• SCANNING ELECTRON MICROSCOPY
• STRUCTURAL CHANGE
• ELECTRON ENERGY LOSS SPECTROSCOPY
• AMORPHOUS CARBON