Duo-Plasmaline — a linearly extended homogeneous low pressure plasma source
- 1 August 1997
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 93 (1) , 112-118
- https://doi.org/10.1016/s0257-8972(97)00015-7
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
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- Elongated microwave electron cyclotron resonance heating plasma sourceJournal of Vacuum Science & Technology A, 1990