Patterning of AlN, InN, and GaN in KOH-based solutions

• 1 May 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 14  (3) , 836-839
• https://doi.org/10.1116/1.580399

Abstract

Keywords

• POTASSIUM
• ACTIVATION ENERGY
• SINGLE CRYSTAL
• REACTION RATE