Thickness uniformity of gas-phase coatings in narrow channels: I. Long channels
- 18 June 2002
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 35 (13) , 1516-1525
- https://doi.org/10.1088/0022-3727/35/13/311
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
- Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfacesJournal of Applied Physics, 2000
- Direct identification of the synergism between methyl radicals and atomic hydrogen during growth of amorphous hydrogenated carbon filmsApplied Physics Letters, 2000
- Mechanistic feature-scale profile simulation of SiO2 low-pressure chemical vapor deposition by tetraethoxysilane pyrolysisJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Deposition of poly-p-xylylene films by plasma decomposition of cyclodi-p-xylyleneJournal of Applied Polymer Science, 1995
- Pulsed-laser deposition of polytetrafluoroethyleneJournal of Materials Research, 1995
- Surface reaction probability of film-producing radicals in silane glow dischargesJournal of Applied Physics, 1990
- Vapor Phase Consolidation of Books with the Parylene PolymersJournal of the American Institute for Conservation, 1986
- Penetration of p‐xylylene vapor into small channels prior to polymerizationJournal of Applied Polymer Science, 1981
- A Model for the Vapor Deposition Polymerization of p-XylyleneMacromolecules, 1978
- Evaporation of polytetrafluoroethylene by electron bombardment of the bulk materialThin Solid Films, 1974