Low energy cluster impact simulated by molecular dynamics; angular distribution of sputtering yield and impact under various impact angles
- 1 April 1994
- journal article
- research article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 88 (1-2) , 196-201
- https://doi.org/10.1016/0168-583x(94)96104-2
Abstract
No abstract availableKeywords
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- Cluster-beam deposition of thin films: A molecular dynamics simulationJournal of Applied Physics, 1987
- Computer "Experiments" on Classical Fluids. I. Thermodynamical Properties of Lennard-Jones MoleculesPhysical Review B, 1967