Fabrication and testing of 0.1-μm-linewidth microgap x-ray masks

• 1 November 1990
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 8  (6) , 1604-1608
• https://doi.org/10.1116/1.585124

Abstract

Keywords

• LINEWIDTH MICROGAP
• M LINEWIDTH
• MICROGAP X
• RAY MASKS
• FABRICATION AND TESTING