Utilization of Rutherford backscatter spectroscopy for the determination of thin-film densities
- 1 May 1982
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 53 (5) , 3900-3902
- https://doi.org/10.1063/1.331095
Abstract
A method to determine densities of thin surface films by measuring areal densities using Rutherford backscatter spectroscopy coupled with linear film-thickness measurements is described. This technique can be nondestructive and has an accuracy of 10 to 15%. Sample measurements on various thin films are given to demonstrate the use of this procedure.This publication has 0 references indexed in Scilit: