Design And Assembly Of A High Resolution Schwarzschild Microscope For Soft X Rays
- 24 March 1982
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 0316, 90-100
- https://doi.org/10.1117/12.933138
Abstract
Recently developed multilayer coatings permit use of normal incidence optics for soft x-rays promising a resolution that should be substantially better than that obtained with grazing incidence optics. We describe the design and assembly of a Schwarzschild objective for a scanning x-ray microscope. The Schwarzschild objective, consisting of two nearly concentric spherical mirrors promises diffraction-limited resolution for soft x-rays.Keywords
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