The use of Auger electron spectroscopy to characterize impurity effects in thin films

• 15 August 1978
• journal article
• abstracts
• Published by Elsevier in Thin Solid Films
• Vol. 53  (1) , 29-30
• https://doi.org/10.1016/0040-6090(78)90366-8

Abstract

Keywords

• THIN FILMS
• AUGER ELECTRON
• IMPURITY EFFECTS
• CHARACTERIZE IMPURITY
• ELECTRON SPECTROSCOPY
• USE OF AUGER